scientific output

For a list of publications you can find my profile in Google Scholar and ORCID: 0000-0001-8207-3825

My book!

Growth and transport in nanostructured materials: reactive transport in PVD, CVD, and ALD

Selected talks

[Invited Talk] Machine learning approaches to accelerate nanomaterials growth and co-design in microelectronics and energy applications, NanoKorea 2023, South Korea (2023).

[Invited Talk] The Insect Brain as a Model System for Smart Neuromorphic Structures for the Edge, 2023 German-American Frontiers of Engineering Symposium, National Academies of Engineering, Julich, Germany (2023).

[Seminar] Machine learning for thin film growth and microelectronics: exploring process optimization, self-driving reactors, and application-driven codesign, Graduate Colloquium, Materials Science and Engineering Department, University of Illinois at Urbana-Champaign (2022).

[Seminar] Insect-Inspired Architectures for Computing at the Edge: A Pathway to On-Chip, Continual Learning and Computing Under Extreme Environments, Minnesota NeuroSpin Initiative, University of Minnesota (2022).

[Seminar] Insect-inspired architectures for computing at the edge: a pathway to on-chip, continual learning and computing under extreme environments, University of Southampton, UK (2022).

[Seminar] Low temperature routes to MgB2 films for cavities using atomic layer deposition, TTC Thin Film Seminar, Deutsches Elektronen-Synchrotron DESY, Germany (2022).

[Seminar] Changing the game for artificial intelligence with neuromorphic computing, NNSA Emerging Technologies Seminar - Microelectronics (2021).

[Seminar] Understanding Material Growth Using Atomic Layer Deposition, Penn State University (2021).

[Seminar] Materials and Architectures for Brain-Inspired Computing, NNSA Emerging Technologies Seminar - Brain Computer Interface Technologies (2021)

[Invited Talk] Exploring the Potential of Machine Learning and AI for ALD Process Optimization, 240th ECS Meeting, Virtual (2021).

[Invited Talk ] Predicting conformality in ALD: from fundamentals to machine learning, 2020 November Networking – ALD at Aalto University, Finland (Virtual, 2020).

[Invited tutorial] ALD on High Aspect Ratio and Nanostructured Materials: from Fundamentals to Economics, ALD/ALE 2020 Virtual Meeting (2020).

[Seminar] In-situ characterization, theory, and co-design approaches to accelerate the development of novel thin film processes and devices, AVS Student Chapter colloquium, University of Illinois at Urbana-Champaign (2020).

[Invited] From molecules to solid: probing the structure of sub-nm ALD materials through in-situ FTIR and synchrotron techniques, Japan Vacuum Society Symposium, Tsukuba, Japan (2019).

[Invited Talk] How Chemistry Drives Microstructure: Probing the Structure of sub-nm ALD Materials using in-situ FTIR and Synchrotron Techniques, PCSI 46, Santa Fe, New Mexico (2019).

[Invited Talk] Neuromorphic Architectures for Smart Sensing Applications—Lessons from the Insect Brain, PCSI 46, Santa Fe, New Mexico (2019).

[Invited Talk] The impact of surface chemistry on throughput and conformality: a comparison between ALD and low pressure CVD, EMRS Fall Meeting, Warsaw (2018)

[Invited Talk] Building blocks and materials needs in neuromorphic computing: lessons from the insect brain, MRS Spring Meeting, Tucson, Arizona (2018).

[Invited Session Talk] The structure of sub-nm oxides synthesized by atomic layer deposition: from isolated cations to the emergence of crystallinity, AVS 64th International Symposium and Exhibition, Tampa, Florida (2017). 2017 AVS Rising Star talk.

[Invited Talk] When there is no bulk: growth and structure of semiconductor oxides and nanolaminates, 17th International Conference in Atomic Layer Deposition, Denver, Colorado (2017).

[Invited Talk] Linking surface kinetics, microstructure, and conformality: early steps towards predictive synthesis in ALD and CVD, Joint EuroCVD 21 - Baltic ALD 15, Linkoping, Sweden (2017)

[Panelist] Building to last: challenges in additive manufacturing going from prototype to functional component. Roadmap Workshop on Measurement Science for Polymer-Based Additive Manufacturing, Gaithersburg, USA (2016)

[Invited talk] Growth under the influence of chemistry: the emergence of microstructure and metastable phases far from equilibrium, Fall 2015 Prairie Section Meeting, Notre Dame (2015)

[Invited talk] From Atom to Solid: The Structure of Amorphous ALD Thin Films and Nanolaminates, AVS 62nd International Symposium & Exhibition, San Jose (2015)

[Invited talk] Analytic solution to the problem of ALD growth in cross-flow reactors: surface coverage, saturation curves, and scale up, 13th International Conference on Atomic Layer Deposition, San Diego (2013)

[Invited talk] In-situ FTIR characterization of growth inhibition in Atomic Layer Deposition using reversible surface functionalization, Pacific Rim Meeting on Electrochemical and Solid-State Science, Honolulu, Hawaii (2012).

[Featured talk] In-situ FTIR characterization of growth inhibition in Atomic Layer Deposition using reversible surface functionalization, 12th International Conference on Atomic Layer Deposition, Dresden, Germany (2012).

Book chapters

A. Yanguas-Gil and H. Woormester, Relationship between Surface Morphology and Effective Medium Roughness, in Ellipsometry at the Nanoscale, M. Losurdo and K. Hingerl, eds. Springer-Verlag (2013).

Patents

  1. Atomic layer deposition for continuous, high-speed thin films, US Patent 12,006,570

  2. Methods for low-temperature p-CVD and thermal ALD of magnesium diboride, US Patent 11,773,488

  3. Refractory solar selective coatings, US Patent 11,435,114

  4. Molecular layer etching, US Patent 11,257,682

  5. Polymer-hybrid electro-optic devices and method of fabricating polymer-hybrid electro-optic devices, US Patent 10,164,188

  6. Fast method for reactor and feature scale coupling in ALD and CVD, US Patent 9,727,672

  7. Method and system for continuous atomic layer deposition, US Patent 9,598,769

  8. Doping control by ALD surface functionalization, US Patent 8,951,615

  9. Surface preparation for thin film growth by enhanced nucleation, US Patent 8,110,503

  10. Surface preparation for thin film growth by enhanced nucleation, US Patent 7,943,527